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Trias SPA

Trias SPA/LPA

Trias SPA is a plasma treatment reactor for nitridation and oxidation. The reactor is based on Slot Plane Antenna(SPA) plasma technology, which creates a high-density, low-electron temperature plasma with excellent uniformity. This provides stable, damage-free plasma processing which improves the speed and reliability of transistor fabrication.

Applications

  • Gate nitridation, STI Liner/Recovery oxidation,Post treatment(High-k, CVD films)

Features

  • Wafer size : 200mm, 300mm
  • Number of process modules : 1 to 4
  • Number of process modules : 1 to 4
  • *Trias is a registered trademark or a trademark of Tokyo Electron Limited in Japan and other countries.

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