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Flat Panel Display Equipment

FPD Etch/Ash Systems

FPD Etch/Ash Systems

The expanding flat panel display market is one of the fields with high future growth potential. TEL develops plasma etch/ash systems and coater/developer systems for the flat panel display production equipment market. The company's plasma etch/ash systems are manufactured at Tokyo Electron AT, a subsidiary of TEL, and TEL's coaters/developers are developed and manufactured by Tokyo Electron Kyushu, another subsidiary of TEL.

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