CLEAN TRACK ACT 12/8
The CLEAN TRACK ACT 12 and ACT 8 are the most reliable 300mm and 200mm coater/developers on the market. With thousands of systems shipped worldwide, the ACT series has proven hardware reliability and process stability that exceeds the most stringent photolithography requirements. Airborne chemical filtration, innovative chemical dispense systems, and excellent thermal uniformity of PEB hotplates allow for state-of-the-art 193nm processing. Optimized equipment accessibility and superior component reliability contribute to unsurpassed uptime performance.
Applications
- Dry Lithography Process（ArF, KrF, i-line）
Features
- 120WPH（Wafer per Hour）throughput capable
- 300mm（200mm）factory automation integration
- In-line metrology options
- Remote recipe editor, data analyzer and reliability monitoring system
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