(Effective on October 1, 2006)

Kengo Kuroiwa

(New) Corporate Director

(Now) Corporate Director, Manufacturing

       and SVP, Manufacturing & IT

Haruo Iwatsu

(New) Corporate Director, Manufacturing

       and SVP, Manufacturing & IT

       and Chairman, Tokyo Electron Kyushu Ltd.

(Now) Corporate Director, SVP, General Manager, SPE-1 Division.

       and President & Representative Director, Tokyo Electron Kyushu Ltd.

       and Chairman, Tokyo Electron Taiwan Ltd.

Akira Miura

(New) VP & General Manager, SPE-1 Division.

       and President & Representative Director, Tokyo ElectronKyushu Ltd.

       and Chairman, Tokyo Electron Taiwan Ltd.

(Now) SVP, Tokyo Electron Kyushu Ltd.

Noriyuki Kuga

(New) EVP, Tokyo Electron Device Ltd

(Now) President & Representative Director, Tokyo Electron BP Ltd.

       and General Manager, Fuchu Technology Center

Takayoshi Ida

(New) President & Representative Director, Tokyo Electron BPLtd.

       and General Manager, Fuchu Technology Center

(Now) VP & General Manager, Tokyo Electron FE Ltd.

Katsuyuki Amano

(New) VP & General Manager, Tokyo Electron Device Ltd.

(Now) VP & General Manager, Computer Network Division.

Tatsuzo Kawaguchi

(New) Senior Director, Tokyo Electron AT Ltd.

(Now) Senior Director, Corporate Process Integration