TOKYO––Apr. 22, 2004––Tokyo Electron Limited (TEL) announced Thursday that it will begin selling a FPD coater/developer with a spinless coating unit capable of handling 6th generation substrates (measuring 1,500mm by 1,800mm) used in the production of flat panel displays (FPDs). TEL has engaged in an effort to commercialize a spinless coating unit by signing a cooperative agreement with Hirata Corporation (Head Office: Shinagawa-ku, Tokyo; President: Yasunari Hirata).

TEL's existing FPD coater/developer models utilize a spin-type coating method, which rotates substrates after drops of photoresist are applied to glass substrates. However, as substrate sizes expand, the spin-coating method requires additional photoresist. In addition, the rotating mechanism increases the size of the tool, causing additional problems associated with logistics, such as shipping and installation.

In order to to solve these issues and promptly respond to market needs, TEL is introducing an FPD coater/developer with Hirata Corporation's spinless coating unit, which has achieved proven results in production. The newly commercialized coating unit requires less photoresist, and eliminates the need for a rotating mechanism, thereby reducing unit size, operational costs and energy consumption.

The spinless coating unit will be integrated with FPD coater/developers (handling 6th or later generation substrates) developed and produced by Tokyo Electron Kyushu Limited (Head Office: Koshi-machi, Kikuchi-gun, Kumamoto Prefecture; President: Haruo Iwatsu), TEL's wholly owned production subsidiary. TEL will be responsible for selling the new product.

Product shipment is scheduled to begin in August 2004. TEL anticipates selling 30 to 40 units during the first year.