TOKYO, JAPAN -- Tokyo Electron Limited (TEL; Head Office: Minato-ku, Tokyo; CEO, President: Tetsuro Higashi) announced today that its Chinese subsidiary, Tokyo Electron (Shanghai) Limited (Shanghai, China; President: Jay Chen), will acquire a tract of land at the Shanghai Zhangjiang Hi-tech Park in Shanghai, operated by Shanghai Zhangjiang Hi-tech Park Corp. (Shanghai, China; President & CEO: Haibo Dai), to build a new office building there.

Production of semiconductors in China is expected to grow significantly with the rapid proliferation of various IT-related devices including mobile phones, and semiconductor manufacturers plan to step up their capital investments in the country in the future. Tokyo Electron (Shanghai) was established in April 2002 and initially started operations with a staff of about 70 people, but as a result of efforts to improve its support organization in response to developments related to the rapid expansion of customers, its current workforce stands at about 150 persons. Since business is also expected to increase further in the future, plans call for the company to increase to around 300 the number of personnel required for the supply of parts for semiconductor production equipment and FPD production equipment, technical service, training and other operations by the end of 2006. The acquisition of land and the construction of a new office building are intended to meet these requirements, and the outline of these plans is as follows:

<Outline of land>

Name:	Shanghai Zhangjiang Hi-tech Park IC Industry Base
Location:	Pudong, Shanghai
Area:	About 18,800 m2

<New Office Building>

Structure:	Four-storied reinforced concrete building
Area:	Building area of about 2,300 m2 with a total floor space of about 7,400 m2 (6,000 m2 for offices and other facilities, and 1,400 m2 for a training center)

Tetsuro Higashi, CEO, President of TEL, said, "The Shanghai Zhangjiang Hi-tech Park is a hi-tech industrial complex provided completely with the necessary equipment and services, where major Chinese semiconductor manufacturers have also moved their plants, and it is an extremely important base for TEL's future business development. TEL will further enhance customer satisfaction through location of its Chinese subsidiary's new office building at the complex, thereby contributing to development of the semiconductor industry in China."