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May 10, 2002

Personnel Changes in the Board Membership


1. Candidates to be newly elected as corporate directors
Hirosuke Ishibashi (Statuary Auditor of Tokyo Electron Limited)
Mamoru Hara (President and Representative Director of Tokyo Electron AT Limited)
Toshiyuki Kondo* (President of SRL, Inc.)

*Outside corporate director

Note: Mamoru Hara and Toshiyuki Kondo will remain at their current office.
2. Candidates to be newly elected as statutory auditors
Keiichiro Kuriyama (Corporate Director of Tokyo Electron Limited)
Fujio Kimura* (Executive Director of TBS Service, Inc.)

*Outside statutory auditors

3. Corporate directors to be retired
Kuniyuki Matsuba
Hiroshi Takashima
4. Statutory auditors to be retired
Yoriaki Miyoshi


Note: Above personnel changes are scheduled to become effective at the Fiscal Year 2002 (the 39th FY) Annual Shareholders Meeting on 21 June, 2002.

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