The Tokyo Electron Group adopted the TEL Group Credo and Principles on Environmental Preservation as a statement of the group's positions and direction concerning the environment.

<The Tokyo Electron Group Credo on Environmental Preservation>

The TEL Group believes that preserving the global environment and constantly improving it is one of the most important objectives for mankind as well as for business. Based on this credo, we are determined to expand our business by maintaining harmony with the global environment, while reinforcing the trust of our many customers, shareholders, employees, and society in general.

<The Tokyo Electron Group Principles on Environmental Preservation>

1. Continuous Improvement

The TEL Group is conscious that products manufactured by the Group affect the environment, and based on this awareness, we, with our customers and suppliers, shall continually strive to minimize the impact of processes and operations on the environment. We will develop products consistent with a clearly defined environmental roadmap for the Group products, verifying the appropriateness of efforts during design, manufacture, and use. To further confirm the appropriateness of such efforts, we will undertake activities that fully take into account regulatory and industry requirements and the needs of customers and other stakeholders.

2. Knowledge

The TEL Group continually strives to enhance its understanding of the impact that the Group has on the environment and the responsibility that this entails. In addition, the Group aims to gain a quantitative grasp of environmental factors, and the impacts resulting from its activities and operations.

3. Performance Criteria

In addition to strict adherence to environmental laws, treaties, and agreements, the TEL Group will also promote conservation of the global environment by formulating activity plans that take into account industry standards and various other environmental requirements.

4. Disclosure

In addition to ensuring that all employees clearly understand our environmental concepts and policies, including the results of company contributions toward environmental protection, the status of manufacturing-related environmental efforts, and the initiative to improve overall awareness, we will disclose relevant information to those outside the company via environmental reports and other means.

5. Partnership

The TEL Group actively participates in environmental protection activities practiced by its customers, suppliers, and communities. May 26, 2006